Mod-02 Lec-10 Surface Micromachining of Microstructures

Course Lectures

• Mod-01 Lec-01 Glimpses of Microsystems: Scaling Effects

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-01 Lec-02 Smart Materials and Systems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-01 Lec-03 Microsensors

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-01 Lec-04 Microactuators

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-01 Lec-05 Microsystems: some Examples

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-01 Lec-06 Smart systems Application and Structural Health Monitoring

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-07 Microfabrication Technologies

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-08 Thin-film Materials and their Deposition

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-09 Approaches for Pattern Transfer

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-10 Surface Micromachining of Microstructures

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-11 Bulk Micromachining of Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-12 Extended Approaches for Working Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-13 Non-conventional Approaches for Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-02 Lec-14 Packaging of Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-15 Deformation Strains and Stresses

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-16 Microdevice Suspensions: Lumped Modeling

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-17 Residual Stress and Stress Gradients

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-18 Torsion and Twist

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-19 Vibrations of Microsystems Devices: Part -1

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-20 Vibrations of Microsystems Devices: Part -2 Micromachined Gyroscopes: Part -1

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-21 Micromachined Gyroscopes: Part -2 Modelling of Coupled Electrostatic

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-22 Modelling of Coupled Electrostatic Microsystems: Part -2

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-23 Coupled Electrothermal-elastic Modelling

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-03 Lec-24 Modelling of Microsystems: Scaling Effects

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-25 Finite Element Method and Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-26 Theoretical Basis for the Finite Element Method

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-27 Energy Theorems and Weak Form of the Governing Equation

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-28 Finite Element Equation Development and Shape Functions

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-29 Isoparametric FE Formulation and some Examples

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-04 Lec-30 Finite Element for Structures with Piezoelectric Material

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-31 Semiconductor Device Physics

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-32 BJT and MOSFET Characteristics and Op-Amps

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-33 Op-Amp Circuits and Signal conditioning for Microsystems Devices

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-34 Control and Microsystems

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-35 Vibration Control of a Beam

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-36 Signal Conditioning Circuits and Integration of Microsystems and Microelectronics

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-37 Pressure Sensor Design Concepts, Processing, and Packaging: Part -1

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-38 Pressure Sensor Design Concepts, Processing, and Packaging: Part -2

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-39 Pressure Sensor Design Concepts, Processing, and Packaging: Part -3

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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• Mod-05 Lec-40 Capacitive Micro-accelerometer: Part -2

  Dr. K.J. Vinoy, Prof. S. Gopalakrishnan, Prof. K.N. Bhat, Prof. G.K. Anathasuresh

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