Lecture - 10 Micromachining Technology for MEMS

Course Lectures

• Lecture - 1 Introduction to MEMS & Microsystems

  Prof. Santiram Kal

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• Lecture - 2 Introduction to Microsensors

  Prof. Santiram Kal

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• Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey

  Prof. Santiram Kal

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• Lecture - 4 Application of MEMS

  Prof. Santiram Kal

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• Lecture - 5 MEMS Materials

  Prof. Santiram Kal

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• Lecture - 6 MEMS Materials' Properties

  Prof. Santiram Kal

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• Lecture - 7 MEMS Materials Properties (Contd.)

  Prof. Santiram Kal

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• Lecture - 8 Microelectronic Technology for MEMS - II

  Prof. Santiram Kal

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• Lecture - 9 Microelectronic Technology for MEMS - III

  Prof. Santiram Kal

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• Lecture - 10 Micromachining Technology for MEMS

  Prof. Santiram Kal

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• Lecture - 11 Micromachining Process

  Prof. Santiram Kal

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• Lecture - 12 Etch Stop Techniques and Microstructure

  Prof. Santiram Kal

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• Lecture - 13 Surface and Quartz Micromachining

  Prof. Santiram Kal

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• Lecture - 14 Fabrication of Micromachined Microstructure

  Prof. Santiram Kal

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• Lecture - 15 Microstereolithography

  Prof. Santiram Kal

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• Lecture - 16 MEMS Microsensors Thermal

  Prof. Santiram Kal

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• Lecture - 17 Micromachined Microsensors Mechanical

  Prof. Santiram Kal

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• Lecture - 18 MEMS Pressure and Flow Sensor

  Prof. Santiram Kal

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• Lecture - 19 Micromachined Flow Sensors

  Prof. Santiram Kal

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• Lecture - 20 MEMS Inertial Sensors

  Prof. Santiram Kal

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• Lecture - 21 Micromachined Microaccelerometers for MEMS

  Prof. Santiram Kal

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• Lecture - 22 MEMS Accelerometers for Avionics

  Prof. Santiram Kal

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• Lecture - 23 Temperature Drift and Damping Analysis

  Prof. Santiram Kal

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• Lecture - 24 Piezoresistive Accelerometer Technology

  Prof. Santiram Kal

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• Lecture - 25 MEMS Capacitive Accelerometer

  Prof. Santiram Kal

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• Lecture - 26 MEMS Capacitive Accelerometer Process

  Prof. Santiram Kal

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• Lecture - 27 MEMS Gyro Sensor

  Prof. Santiram Kal

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• Lecture - 28 MEMS for Space Application

  Prof. Santiram Kal

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• Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT

  Prof. Santiram Kal

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• Lecture - 30 Wafer Bonding & Packaging of MEMS

  Prof. Santiram Kal

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• Lecture - 31 Interface Electronics for MEMS

  Prof. Santiram Kal

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• Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS)

  Prof. Santiram Kal

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