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Lecture - 7 MEMS Materials Properties (Contd.)
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Indian Institute of Technology Kharagpur
MEMS and Microsystems
Lecture - 7 MEMS Materials Properties (Contd.)
Course Lectures
Lecture - 1 Introduction to MEMS & Microsystems
Prof. Santiram Kal
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Lecture - 2 Introduction to Microsensors
Prof. Santiram Kal
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Lecture - 3 Evoluation of MEMS, Microsensors, Market Survey
Prof. Santiram Kal
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Lecture - 4 Application of MEMS
Prof. Santiram Kal
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Lecture - 5 MEMS Materials
Prof. Santiram Kal
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Lecture - 6 MEMS Materials' Properties
Prof. Santiram Kal
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Lecture - 7 MEMS Materials Properties (Contd.)
Prof. Santiram Kal
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Lecture - 8 Microelectronic Technology for MEMS - II
Prof. Santiram Kal
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Lecture - 9 Microelectronic Technology for MEMS - III
Prof. Santiram Kal
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Lecture - 10 Micromachining Technology for MEMS
Prof. Santiram Kal
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Lecture - 11 Micromachining Process
Prof. Santiram Kal
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Lecture - 12 Etch Stop Techniques and Microstructure
Prof. Santiram Kal
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Lecture - 13 Surface and Quartz Micromachining
Prof. Santiram Kal
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Lecture - 14 Fabrication of Micromachined Microstructure
Prof. Santiram Kal
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Lecture - 15 Microstereolithography
Prof. Santiram Kal
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Lecture - 16 MEMS Microsensors Thermal
Prof. Santiram Kal
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Lecture - 17 Micromachined Microsensors Mechanical
Prof. Santiram Kal
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Lecture - 18 MEMS Pressure and Flow Sensor
Prof. Santiram Kal
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Lecture - 19 Micromachined Flow Sensors
Prof. Santiram Kal
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Lecture - 20 MEMS Inertial Sensors
Prof. Santiram Kal
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Lecture - 21 Micromachined Microaccelerometers for MEMS
Prof. Santiram Kal
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Lecture - 22 MEMS Accelerometers for Avionics
Prof. Santiram Kal
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Lecture - 23 Temperature Drift and Damping Analysis
Prof. Santiram Kal
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Lecture - 24 Piezoresistive Accelerometer Technology
Prof. Santiram Kal
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Lecture - 25 MEMS Capacitive Accelerometer
Prof. Santiram Kal
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Lecture - 26 MEMS Capacitive Accelerometer Process
Prof. Santiram Kal
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Lecture - 27 MEMS Gyro Sensor
Prof. Santiram Kal
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Lecture - 28 MEMS for Space Application
Prof. Santiram Kal
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Lecture - 29 Polymer MEMS & Carbon Nano Tubes CNT
Prof. Santiram Kal
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Lecture - 30 Wafer Bonding & Packaging of MEMS
Prof. Santiram Kal
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Lecture - 31 Interface Electronics for MEMS
Prof. Santiram Kal
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Lecture - 32 MEMS for Biomedical Applications (Bio-MEMS)
Prof. Santiram Kal
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